NEW Advanced Energy/Aera FC-D982 HCl Mass Flow Controller ASM 54-125738A03 MFC

Description: NEW Advanced Energy/Aera FC-D982 30 SLM HCl Digital Mass Flow Controller, ASM PN: 54-125738A03 Comes with what you see in the pictures. If you don't see it, you probably wont get it. Specifications are from Advanced Energy and may vary slightly due to upgrades, options, or revisions this unit may or may not have. This part is new, old stock from ASM. ASM Information: Part Number: 54-125738A03 Description: FC-AERA D982-HCL-30 SLM-NO-AI-DGTL The Unit's Tag Reads: Model Number: FC-D982 Flow Range: 30000 SCCM Gas: HCl Fitting: 4V Semi-Gas #: 11 Calibration Gas: N2 N2 Calibration Factor: 0.997 Description: Aera FC-D980 series digital MFCs (mass flow controllers) and MFMs (mass flow meters) deliver performance excellence and operational versatility, resulting in significant cost savings and ease of use. Operational Specifications: Full-Scale Ranges: Single-gas model - 31 to 50 slm Response Time: < or = to 1.0 sec typical per SEMI E17-91 (above 10% of full scale) Accuracy: < or = to ±1% of set point from 20 to 100% of full scale, < or = to ±0.25% of full scale from 2 to 25% of full scale Repeatability: < or = to ±0.2% of full scale Leak Integrity: 1 x 10-10 atm-cc/sec (He) maximum Control Range: 2 to 100% of full scale[4][5] Differential Pressure: 28 to 40 psi (194 to 275 kPa) Max. Operating Pressure: 70 psiG (490 kPaG) Proof Pressure: 140 psiG (981 kPaG) Temperature: 5 to 45°C (41 to 113°F) Gas Calibration: Up to six gases, with 11 calibration points per gas Gas Calibration Selection: Unlimited, based on using four surrogate calibration gases Alarm/Diagnostic Functions: Flow, valve voltage, EEPROM error, zero adjustment error, communications error, and microprocessor error Notes: 4: The multi-gas control range for D980 series MFCs with normally-closed control valves is 2 to 100% for all gases excluding H2 and He. The H2 and He control range is 5 to 100%. The multi-gas contorl range for D980 series MFCs with normally-open control valves is 5 to 100% for all gases. 5: The multi-gas control range for all D981 series MFCs is 5 to 100% for all gases. Physical Specifications: Control Valve Type: Normally-open or normally-closed piezoelectric Materials: Double VAR stainless steel, type 316L Standard Fittings: 1/4" VCR Surface Finish: All gas-wetted surfaces are electropolished and ultra-cleaned to 1 Ra (0.025 µm) Attitude Sensitivity: May be mounted in any position Weight: 1.8 kg (3.9 lb) Electrical Specifications: Input Power: +15 VDC ±2% at 140 mA, -15 VDC ±2% at 60 mA Power Consumption: 2.1 W max Input Signal: 0 to 5 VDC Output Indication: 0 to 5 VDC Control Data: Up to six sets of PID data For Domestic Customers: Packaging, handling, and order processing included in shipping in all domestic shipments as quoted by the shipping calculator. For International Customers there is a $15.00 minimum for packaging, handling, and order processing. International shipping to be determined by destination. Prior to shipment I will need to know the following information (filled out on a form that I will send you) for International Customers or Packages/Freight being Forwarded internationally. International customers may also be subject to a freight forwarder form if applicable.: (1) Are you the end-user of this item? (2) If you are not the ultimate end-user of the item, please state the ultimate end user's name. (3) What is the ultimate country destination? 02/24/12

Price: 1296.62 USD

Location: Phoenix, Arizona

End Time: 2024-02-29T23:36:54.000Z

Shipping Cost: N/A USD